Development of x-ray mirror foils using a hot plastic deformation process

被引：2

作者：

Nakaniwa, Nozomi ^{[1
]}

Ezoe, Yuichiro ^{[1
]}

Numazawa, Masaki ^{[1
]}

Takeo, Mai ^{[1
]}

Ishida, Manabu ^{[2
]}

Ishikawa, Kumi ^{[2
]}

Morishita, Kohei ^{[3
]}

Nakajima, Kazuo ^{[4
]}

机构：

[1] Tokyo Metropolitan Univ, Dept Phys, 1-1 Minami Osawa, Hachioji, Tokyo 1920397, Japan

[2] Inst Space & Astronaut Sci ISAS JAXA, Chuo Ward, 3-1-1 Yoshinodai, Sagamihara, Kanagawa 2525210, Japan

[3] Kyushu Univ, Nishi Ku, 744 Motooka, Fukuoka 8190395, Japan

[4] Tohoku Univ, Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan

来源：

APPLIED OPTICS | 2020年 / 59卷 / 28期

基金：

日本学术振兴会;

关键词：

OPTICS;

D O I：

10.1364/AO.401644

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, we present a silicon reflector developed through a hot plastic deformation process and used as a lightweight, high-angular-resolution x-ray mirror. We deformed the silicon substrate using conical dies with a curvature radius of 100 mm. The measured radii of the reflector were approximately 100 mu m greater than the design values. Due to a gap between the die and the reflector toward the edge, it is probable that the substrate did not reach the yield point, and an elastic spring back occurred. In addition, we have evaluated the x-ray imaging capability of the plastically deformed silicon reflector for the first time, to the best of our knowledge. The estimated angular resolution is 1.76 are min from the entire reflector, and 0.52 are min in the best region. For the enhancement of the imaging capability, we may improve the shape of die and determine the best parameter set for the deformation. (C) 2020 Optical Society of America

引用

页码：8793 / 8805

页数：13

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