Studies on system and measuring method of far-field beam divergency in near-field by Ronchi ruling

被引：0
|
作者：
Zhou, CB [1 ]
Yang, L [1 ]
Ma, WL [1 ]
Yan, PY [1 ]
Fan, TQ [1 ]
He, SF [1 ]
机构：
[1] CHINESE ACAD SCI,INST OPT & ELECT,SHUANGLIU 610209,CHENGDU,PEOPLES R CHINA
来源：
AUTOMATED OPTICAL INSPECTION FOR INDUSTRY | 1996年 / 2899卷
关键词：
Ronchi ruling; Gaussian beam; far-field divergency; near-field; measurement; scanning; data processing; single-chip microcomputer;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：539 / 544
页数：6
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