Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

被引：0

作者：

Quack, Niels ^{[1
]}

Sattari, Hamed ^{[1
]}

Takabayashi, Alain Y. ^{[1
]}

Zhang, Yu ^{[1
]}

Edinger, Pierre ^{[2
]}

Errando-Herranz, Carlos ^{[2
]}

Gylfason, Kristinn B. ^{[2
]}

Wang, Xiaojing ^{[2
]}

Niklaus, Frank ^{[2
]}

Jezzini, Moises A. ^{[3
]}

Hwang, How Yuan ^{[3
]}

O'Brien, Peter ^{[3
]}

Porcel, Marco A. G. ^{[4
]}

Arce, Cristina Lerma ^{[5
]}

Kumar, Saurav ^{[5
]}

Abasahl, Banafsheh ^{[6
]}

Verheyen, Peter ^{[6
]}

Bogaerts, Wim ^{[6
]}

机构：

[1] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland

[2] KTH Royal Inst Technol, Malvinas Vag 10, SE-10044 Stockholm, Sweden

[3] Tyndall Natl Inst, Lee Maltings Complex Dyke Parade, Cork T12 R5CP, Ireland

[4] Univ Politecn Valencia, VLC Photon SL, Ed 9B,D2,Camino Vera Sn, Valencia 46022, Spain

[5] Commscope Connect Belgium, Diestsesteenweg 692, B-3010 Kessel Lo, Belgium

[6] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium

来源：

2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC) | 2019年

基金：

瑞士国家科学基金会;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

引用

页数：3

共 50 条

[21] Highly Integrated Silicon Photonic Integrated Circuits for Telecommunications
Doerr, Christopher R.
2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
[22] Photonic Interferometric Imager with monolithic silicon CMOS photonic integrated circuits
Chen, Humphry
On, Mehmet Berkay
Yun-Jhu-Lee
Zhang, Li
Proietti, Roberto
Ben Yoo, S. J.
2022 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2022,
[23] Highly Integrated Silicon Photonic Integrated Circuits for Telecommunications
Doerr, Christopher R.
2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
[24] Modelling of silicon and active photonic integrated circuits
Gallagher, Dominic F. G.
Felici, Thomas
SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS, 2008, 6996
[25] Microring Photodetection in Silicon Photonic Integrated Circuits
Panepucci, Roberto R.
2016 31ST SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO), 2016,
[26] PROGRAMMABLE SILICON NITRIDE PHOTONIC INTEGRATED CIRCUITS
Tian, Hao
Attanasio, Alaina G.
Siddharth, Anat
Voloshin, Andrey
Snigirev, Viacheslav
Lihachev, Grigory
Bancora, Andrea
Shadymov, Vladimir
Wang, Rui N.
Riemensberger, Johann
Kippenberg, Tobias J.
Bhave, Sunil A.
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 149 - 152
[27] Photonic integrated circuits in Silicon-on-Insulator
Bogaerts, W.
Selvaraja, S. K.
Dumon, P.
Absil, P.
Van Thourhout, D.
Baets, R.
2010 IEEE INTERNATIONAL SOI CONFERENCE, 2010,
[28] Design methodologies for silicon photonic integrated circuits
Chrostowski, Lukas
Flueckiger, Jonas
Lin, Charlie
Hochberg, Michael
Pond, James
Klein, Jackson
Ferguson, John
Cone, Chris
SMART PHOTONIC AND OPTOELECTRONIC INTEGRATED CIRCUITS XVI, 2014, 8989
[29] Quantum Dot Photonic Integrated Circuits on Silicon
Bowers, John E.
Gossard, Art
Jung, Daehwan
Norman, Justin
Wan, Yating
2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2018,
[30] Recent Advances in Silicon Photonic Integrated Circuits
Bowers, John E.
Komljenovic, Tin
Davenport, Michael
Hulme, Jared
Liu, Alan Y.
Santis, Christos T.
Spott, Alexander
Srinivasan, Sudharsanan
Stanton, Eric J.
Zhang, Chong
NEXT-GENERATION OPTICAL COMMUNICATION: COMPONENTS, SUB-SYSTEMS, AND SYSTEMS V, 2016, 9774

← 1 2 3 4 5 →