Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

被引：0

作者：

Quack, Niels ^{[1
]}

Sattari, Hamed ^{[1
]}

Takabayashi, Alain Y. ^{[1
]}

Zhang, Yu ^{[1
]}

Edinger, Pierre ^{[2
]}

Errando-Herranz, Carlos ^{[2
]}

Gylfason, Kristinn B. ^{[2
]}

Wang, Xiaojing ^{[2
]}

Niklaus, Frank ^{[2
]}

Jezzini, Moises A. ^{[3
]}

Hwang, How Yuan ^{[3
]}

O'Brien, Peter ^{[3
]}

Porcel, Marco A. G. ^{[4
]}

Arce, Cristina Lerma ^{[5
]}

Kumar, Saurav ^{[5
]}

Abasahl, Banafsheh ^{[6
]}

Verheyen, Peter ^{[6
]}

Bogaerts, Wim ^{[6
]}

机构：

[1] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland

[2] KTH Royal Inst Technol, Malvinas Vag 10, SE-10044 Stockholm, Sweden

[3] Tyndall Natl Inst, Lee Maltings Complex Dyke Parade, Cork T12 R5CP, Ireland

[4] Univ Politecn Valencia, VLC Photon SL, Ed 9B,D2,Camino Vera Sn, Valencia 46022, Spain

[5] Commscope Connect Belgium, Diestsesteenweg 692, B-3010 Kessel Lo, Belgium

[6] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium

来源：

2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC) | 2019年

基金：

瑞士国家科学基金会;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

引用

页数：3

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