3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System

被引：10
|
作者：
Liu, Lin [1 ]
Xie, Huikai [1 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2013年 / 25卷 / 15期
基金：
美国国家科学基金会;
关键词：
MEMS mirror; MEMS lens; confocal microscopy; 3-D scan; thermal actuation;
D O I：
10.1109/LPT.2013.2267794
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 mu m at only 3.2 V. The two-dimensional MEMS mirror can achieve +/- 20 degrees optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 mu m, respectively.
引用
收藏
页码：1478 / 1480
页数：3
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