Deposition of hard diamond-like-carbon films at room temperature

被引：0
|
作者：
Brown, WD
Beera, RA
Naseem, HA
Malshe, AP
机构：
来源：
PROCEEDINGS OF THE THIRTEENTH INTERNATIONAL CONFERENCE ON CHEMICAL VAPOR DEPOSITION | 1996年 / 96卷 / 05期
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D O I：
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：670 / 678
页数：9
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