Universal scaling and intrinsic classification of electro-mechanical actuators

Actuation characteristics of electromechanical (EM) actuators have traditionally been studied for a few specific regular electrode geometries and support (anchor) configurations. The ability to predict actuation characteristics of electrodes of arbitrary geometries and complex support configurations relevant for broad range of applications in switching, displays, and varactors, however, remains an open problem. In this article, we provide four universal scaling relationships for EM actuation characteristics that depend only on the mechanical support configuration and the corresponding electrode geometries, but are independent of the specific geometrical dimensions and material properties of these actuators. These scaling relationships offer an intrinsic classification for actuation behavior of a broad range of EM actuators with vastly different electrode/support geometries. Consequently, the problem of analysis/design of complex EM actuators is reduced to the problem of determining only five scaling parameters, which can be obtained from no more than three independent characterization experiments or numerical simulations. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798365]