Electron scattering cross section measurements in a variable pressure scanning electron microscope

被引：5

作者：

Wight, Scott A. ^{[1
]}

Konicek, Andrew R. ^{[1
]}

机构：

[1] NIST, Surface & Microanal Sci Div, Gaithersburg, MD 20899 USA

来源：

MICRON | 2012年 / 43卷 / 09期

关键词：

Scattering cross section; Stagnation gas thickness; Beam gas path length; Electron scattering; Environmental scanning electron microscope; ESEM; VPSEM; X-RAY-MICROANALYSIS; GAS PATH-LENGTH; BEAM SCATTERING; SEM;

D O I：

10.1016/j.micron.2012.04.003

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Scattering of the incident electron beam in the variable pressure scanning electron microscope (VPSEM) affects the ability to perform quantitative chemical measurements. However, the manner in which the sum of the elastic and inelastic scattering cross sections varies as a function of gas type and accelerating voltage in the VPSEM is not well understood. A dual Faraday cup was constructed to measure the scattered fraction of the primary beam as a function of gas pressure, working distance, and accelerating voltage in air, water vapor, and argon environments. Experimentally measured values of the scattering cross section agree with previous experimental work, and agree within a factor of two with those values calculated carefully from theory. (C) 2012 Published by Elsevier Ltd.

引用

页码：985 / 991

页数：7

共 50 条

[41] The Scanning Electron Microscope
von Ardenne, Manfred
ZEITSCHRIFT FUR PHYSIK, 1938, 109 (9-10): : 553 - 572
[42] SCANNING ELECTRON MICROSCOPE
LANGFORD, MJ
INDUSTRIAL PHOTOGRAPHY, 1968, 17 (04): : 6 - +
[43] SCANNING ELECTRON MICROSCOPE
PEASE, RFW
IEEE SPECTRUM, 1967, 4 (10) : 96 - &
[44] SCANNING ELECTRON MICROSCOPE
OATLEY, CW
SCIENCE PROGRESS, 1966, 54 (216) : 483 - &
[45] SCANNING ELECTRON MICROSCOPE
不详
AGRICULTURAL RESEARCH, 1970, 19 (06) : 8 - &
[46] SCANNING ELECTRON MICROSCOPE
BOYDE, A
QUILLIAM, TA
MEDICAL AND BIOLOGICAL ILLUSTRATION, 1966, 16 (02): : 116 - &
[47] Cross-sectional atomic force microscope in scanning electron microscope
Park, Byong Chon
Song, Woon
Kim, Dal Hyun
Lee, Ju-Yeop
Hong, Jaewan
Kim, Jin Seung
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2014, 32 (06):
[48] ELECTRON-MICROSCOPE TRANSMISSION ELECTRON-MICROSCOPE AND SCANNING ELECTRON-MICROSCOPE
WATANABE, T
DENKI KAGAKU, 1986, 54 (08): : 667 - 670
[49] The effect of beam diameter on the electron skirt in a high pressure scanning electron microscope
Belkorissat, R
Kadoun, A
Khelifa, B
Mathieu, C
MICRON, 2004, 35 (07) : 543 - 547
[50] THE CROSS SECTION FOR INELASTIC ELECTRON SCATTERING IN CRYSTALS
VYATSKIN, AY
SOVIET PHYSICS-SOLID STATE, 1962, 4 (02): : 404 - 404

← 1 2 3 4 5 →