Ballistic nanoindentation of polymers

被引：9
|
作者：
Gotsmann, B. [1 ]
Rothuizen, H. [1 ]
Duerig, U. [1 ]
机构：
[1] IBM Res GmbH, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland
来源：
APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 09期
关键词：
D O I：
10.1063/1.2977867
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Indentation of a sharp (20 nm) cantilevered silicon tip into a polymer (SU8) surface is analyzed experimentally and through finite-element simulations. A rate effect on the microsecond scale that eases indentation is found, in contrast to the commonly observed hardening at high strain rates. The observed rate effect is discussed in terms of adiabatic heating and inertial force overshoot. The estimated magnitude of adiabatic heating is marginal, but the force overshoot itself is large enough to explain the data. The data imply that topographic patterning of a polymer at megahertz rates is feasible. (C) 2008 American Institute of Physics.
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页数：3
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