Development of high-Q superconducting resonators for use as kinetic inductance sensing elements

被引:1
|
作者
Baselmans, JJA
Barends, R
Hovenier, JN
Gao, JR
Hoevers, H
Klapwijk, TM
机构
[1] SRON, Natl Inst Space Res, NL-3584 CA Utrecht, Netherlands
[2] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands
关键词
sub-mm detectors; superconducting detectors; microwave resonators;
D O I
10.1016/j.nima.2005.12.056
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
One of the greatest challenges in the development of very sensitive radiation detectors is the fabrication of a large detector array. Within this context we have started the development of Kinetic Inductance Detectors. The heart of each detector consists of a high-Q superconducting quarter wavelength microwave resonator. As a result, it is easy to multiplex the readout by frequency division multiplexing. We describe our initial experiments with these resonators, made oil 20 x 4 mm high-purity Si chips using 100 nm Nb films. We measure the Q factors of several resonators using a vector network analyzer and find Q factors up to 90.000, limited by the intrinsic quality of the Nb resonator. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:567 / 569
页数:3
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