Design Study of a Guided-Wave Optical Microphone with a Diaphragm

被引：0
|
作者：
Murata, Kazuya [1 ]
Ohkawa, Masashi [2 ]
Sato, Takashi [2 ]
机构：
[1] Niigata Univ, Grad Sch Sci & Technol, Niigata 9502181, Japan
[2] Niigata Univ, Fac Engn, Niigata, Japan
来源：
2012 IEEE SENSORS PROCEEDINGS | 2012年
基金：
日本学术振兴会;
关键词：
PRESSURE SENSOR; SENSITIVITY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Our guided-wave optical microphone consists of a diaphragm and a single-mode optical waveguide on the diaphragm. Since sensitivity and frequency response are strongly dependent on waveguide position and diaphragm dimensions, designing the microphone is relatively complicated without a design guideline. In this report, a convenient and helpful chart diagram when designing the microphone is proposed based on theoretical and experimental results on dependences of sensitivity and resonance frequency on diaphragm dimensions. In addition, since damping of diaphragm vibration is also vital in obtaining a broader flat frequency response, squeeze-film air damping is discussed.
引用
收藏
页码：2160 / 2163
页数：4
相关论文
共 50 条
  • [21] BISTABILITY OF OPTICAL GUIDED-WAVE BEAM DEFLECTOR
    LI, YH
    LIN, SQ
    JIN, F
    WANG, YX
    CHINESE PHYSICS, 1984, 4 (02): : 418 - 423
  • [22] Guided-wave optical time delay network
    Murphy, EJ
    Adda, TF
    Minford, WJ
    Irvin, RW
    Ackerman, EI
    Adams, SB
    IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (04) : 545 - 547
  • [23] Board level guided-wave optical interconnects
    Choi, CC
    Liu, YJ
    Lei, L
    Chen, RT
    ORGANIC PHOTONIC MATERIALS AND DEVICES V, 2003, 4991 : 341 - 354
  • [24] GUIDED-WAVE OPTICAL GATE MATRIX SWITCH
    HIMENO, A
    TERUI, H
    KOBAYASHI, M
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 1988, 6 (01) : 30 - 35
  • [25] GUIDED-WAVE MODES IN CYLINDRICAL OPTICAL FIBERS
    YEH, C
    IEEE TRANSACTIONS ON EDUCATION, 1987, 30 (01) : 43 - 57
  • [26] Silicon-based guided-wave optical flow sensor using a diaphragm with a small opening as an orifice
    Ohkawa, Masashi
    Sato, Takashi
    OPTICAL ENGINEERING, 2016, 55 (01)
  • [27] The design of the apodizing functions for guided-wave EOTF
    周静
    Chinese Optics Letters, 2003, (02) : 68 - 70
  • [28] Design of the apodizing functions for guided-wave EOTF
    Zhou, Jing
    Chinese Optics Letters, 2003, 1 (02) : 68 - 70
  • [29] Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer
    Miura, Yusuke
    Endo, Hideto
    Oshima, Takuya
    Ohkawa, Masashi
    Sato, Takashi
    INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XV, 2011, 7941
  • [30] Experimental demonstration of optical guided-wave Butler matrices
    Gallo, JT
    DeSalvo, R
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1997, 45 (08) : 1501 - 1507
12345