Design Study of a Guided-Wave Optical Microphone with a Diaphragm

被引：0
|
作者：
Murata, Kazuya [1 ]
Ohkawa, Masashi [2 ]
Sato, Takashi [2 ]
机构：
[1] Niigata Univ, Grad Sch Sci & Technol, Niigata 9502181, Japan
[2] Niigata Univ, Fac Engn, Niigata, Japan
来源：
2012 IEEE SENSORS PROCEEDINGS | 2012年
基金：
日本学术振兴会;
关键词：
PRESSURE SENSOR; SENSITIVITY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Our guided-wave optical microphone consists of a diaphragm and a single-mode optical waveguide on the diaphragm. Since sensitivity and frequency response are strongly dependent on waveguide position and diaphragm dimensions, designing the microphone is relatively complicated without a design guideline. In this report, a convenient and helpful chart diagram when designing the microphone is proposed based on theoretical and experimental results on dependences of sensitivity and resonance frequency on diaphragm dimensions. In addition, since damping of diaphragm vibration is also vital in obtaining a broader flat frequency response, squeeze-film air damping is discussed.
引用
收藏
页码：2160 / 2163
页数：4
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