Servo Control of Thrust position for 6DOF Magnetic Suspension Stage

被引：0
|
作者：
Qu, Yongyin [1 ]
Zhou, Zhenxiong [1 ]
机构：
[1] Beihua Univ, Sch Elect & Informat Engn, Jilin 132021, Peoples R China
来源：
NANOTECHNOLOGY AND PRECISION ENGINEERING, PTS 1 AND 2 | 2013年 / 662卷
关键词：
Siphonic Bedpan; Flow Channel Structure; Numerical Simulation; LEVITATION;
D O I：
10.4028/www.scientific.net/AMR.662.831
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A novel 6DOF magnetic suspension stage is studied in this paper, the magnetic suspension stage system includes a suspension system and a thrust servo system, and this paper only studies the thrust system. The thrust system is a nonlinear, multivariable, and strong coupling system. For achieving its precise servo control, we used the auto-disturbance rejection controller to observe the inner and outside disturbance, and to offset the system. The result of simulation and experiment shows that the control scheme applied in the thrust control system has better dynamic, static, and robust characteristics.
引用
收藏
页码：831 / 837
页数：7
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