Multi-objective optimization of flexure hinge mechanism considering thermal-mechanical coupling deformation and natural frequency

Flexure hinge mechanism plays a key part in realization of terminal nano-positioning. The performance of flexure hinge mechanism is determined by its positioning design. Based on the actual working conditions, its finite element model is built and calculated in ANSYS. Moreover, change trends of deformation and natural frequency with positioning design parameters are revealed. And sensitivity analysis is performed for exploration response to these parameters. These parameters are used to build four objective functions. To solve it conveniently, the multi-objective optimization problem is transferred to the form of single-objective function with constraints. An optimal mechanism is obtained by an optimization method combining ANSYS with MATLAB. Finite element numerical simulation has been carried out to demonstrate the superiority of the optimal flexure hinge mechanism, and the superiority can be further verified by experiment. Measurements and tests have been conducted at varying accelerations, velocities, and displacements, to quantify and characterize the amount of acceleration responses obtained from flexure hinge mechanism before and after optimization. Both time-and frequency-domain analyses of experimental data show that the optimal flexure hinge mechanism has superior effectiveness. It will provide a basic for realizing high acceleration and high precision positioning of macro-micro motion platform.