Nitrocellulose-based collodion gate insulator for amorphous indium zinc gallium oxide thin-film transistors

被引:26
|
作者
Kim, Won-Gi [1 ]
Tak, Young Jun [1 ]
Kim, Hyun Jae [1 ]
机构
[1] Yonsei Univ, Sch Elect & Elect Engn, 50 Yonsei Ro, Seoul 120749, South Korea
基金
新加坡国家研究基金会;
关键词
Gate dielectric layer; collodion; dielectric constant; thin-film transistor; IGZO; DISPLAYS; VOLTAGE;
D O I
10.1080/15980316.2017.1408502
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A novel organic material named 'collodion' was suggested as a gate insulator for amorphous indium gallium zinc oxide thin-film transistors (a-IGZO TFTs). To find the optimized condition of the collodion gate insulator (CGI), the following three parameters of collodion solution were controlled: (1) the concentration of collodion solution; (2) the number of stacked layers; and (3) the spin-coating speed. The single-layered diluted CGI (collodion: ethanol=1:1) that was fabricated with a 3 krpm spin-coating speed exhibited an acceptable dielectric strength (J < 10(-10) A/cm(2) in the range of 1.1 MV/cm) and a high-dielectric constant (similar to 6.57) for the gate insulator layer. As a result, a-IGZO TFTs with CGI showed high-field effect mobility (similar to 17.11 cm(2)/Vs).
引用
收藏
页码:39 / 43
页数:5
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