Study of the optical properties of the nickel deposited one-dimensional porous silicon photonic crystal

被引:0
|
作者
Huanca, Danilo R. [1 ]
Salcedo, Walter J. [1 ]
机构
[1] Univ Sao Paulo, Lab Microeletron, Escola Politecn, Sao Paulo, Brazil
来源
2013 28TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2013) | 2013年
关键词
porous silicon photonic crystals; nickel deposition; optical properties; MICROSTRUCTURE; OXIDATION;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thin nickel layer was deposited onto the porous silicon photonic crystal surface and then thermally treated at 900 degrees C. The optical analysis reveals that the shape of the photonic band gap is determined principally by the roughness of the high porosity layer. Nickel presence leads to the suppression of the photonic band gap and it is partially recovered after thermal treatment. The structural characterization shows that after thermal treatment the high porosity layer expands while the low porosity layer contracts, whereas in the upper region of the photonic device, nickel is diffused into the first Hand L layers and reacts with silicon to form Ni3Si and Ni31Si12 porous phases. The average size of them is about 24 and 30 nm depending on the nickel silicide phase.
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页数:4
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