In-volume structuring of silicon using picosecond laser pulses

被引：24
|
作者：
Kaemmer, H. [1 ]
Matthaeus, G. [1 ]
Nolte, S. [1 ,2 ]
Chanal, M. [3 ]
Uteza, O. [3 ]
Grojo, D. [3 ]
机构：
[1] Friedrich Schiller Univ Jena, Inst Angew Phys, Albert Einstein Str 15, D-07745 Jena, Germany
[2] Fraunhofer Inst Angew Opt & Feinmech IOF, Albert Einstein Str 7, D-07745 Jena, Germany
[3] Aix Marseille Univ, CNRS, LP3, UMR7341, F-13288 Marseille, France
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2018年 / 124卷 / 04期
基金：
欧洲研究理事会;
关键词：
WRITING WAVE-GUIDES; FEMTOSECOND LASER; CRYSTALLINE SILICON;
D O I：
10.1007/s00339-018-1715-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have demonstrated for the first time the permanent local modification of the bulk of silicon by repeated illumination with infrared (1.55 mu m) picosecond pulses. Furthermore, we evaluated the characteristics of inscribing permanent modifications in the bulk material for different pulse durations from 0.8 to 10 ps in terms of their reproducibility and controllability of their morphology. Our results are based on a simple experimental setup that demonstrates the possibility of using picosecond pulses for the local modification of bulk silicon as a potential alternative to more complex irradiation strategies required for femtosecond pulse processing.
引用
收藏
页数：6
相关论文
共 50 条
  • [1] In-volume structuring of silicon using picosecond laser pulses
    H. Kämmer
    G. Matthäus
    S. Nolte
    M. Chanal
    O. Utéza
    D. Grojo
    Applied Physics A, 2018, 124
  • [2] In-volume structuring of a bilayered polymer foil using direct laser interference patterning
    Roessler, Florian
    Guenther, Katja
    Lasagni, Andres F.
    APPLIED SURFACE SCIENCE, 2018, 440 : 1166 - 1171
  • [3] Picosecond laser structuring of monocrystalline silicon surface
    Guk, Igor
    Shandybina, Galina
    Yakovlev, Eugeny
    Golovan, Leonid
    FUNDAMENTALS OF LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES 2013, 2013, 9065
  • [4] In-Volume Laser Direct Writing of Silicon-Challenges and Opportunities
    Chambonneau, Maxime
    Grojo, David
    Tokel, Onur
    Ilday, Fatih Omer
    Tzortzakis, Stelios
    Nolte, Stefan
    LASER & PHOTONICS REVIEWS, 2021, 15 (11)
  • [5] Formation of in-volume nanogratings in glass induced by spatiotemporally focused femtosecond laser pulses
    Wang, Zhaohui
    Liao, Yang
    Wang, Peng
    Qi, Jia
    Qiao, Lingling
    Sugioka, Koji
    Cheng, Ya
    ADVANCED OPTICAL TECHNOLOGIES, 2016, 5 (01) : 81 - 85
  • [6] Simulation of the dynamics of heat accumulation during in-volume modification with ultrashort laser pulses
    Nippgen, Sebastian
    Gillner, Arnold
    Smolenko, Andreas
    10TH CIRP CONFERENCE ON PHOTONIC TECHNOLOGIES [LANE 2018], 2018, 74 : 705 - 708
  • [7] Time-resolved microscopy for optimizing in-volume glass processing using ultra short laser pulses
    Bergner, Klaus
    Seyfarth, Brian
    Kumkar, Malte
    Tuennermann, Andreas
    Nolte, Stefan
    2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2016,
  • [8] SURFACE STRUCTURING OF KAPTON POLYIMIDE WITH FEMTOSECOND AND PICOSECOND IR LASER PULSES
    Hrabovsky, Jan
    Liberatore, Chiara
    Mirza, Inam
    Sladek, Juraj
    Beranek, Jiri
    Bulgakov, Alexander, V
    Bulgakova, Nadezhda M.
    INTERFACIAL PHENOMENA AND HEAT TRANSFER, 2019, 7 (02) : 113 - 121
  • [9] Ablation and surface structuring of nitride ceramics induced by picosecond laser pulses
    Nedyalkov, N.
    Dikovska, A.
    Atanasov, P.
    Atanasova, G.
    Aleksandrov, L.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2023, 543
  • [10] Silicon micro-structuring using ultra-short laser pulses
    Zhu, JT
    Li, W
    Zhao, M
    Yin, G
    Chen, X
    Chen, DY
    Zhao, L
    LASERS IN MATERIAL PROCESSING AND MANUFACTURING II, 2005, 5629 : 276 - 283
12345