Core-level photoelectron spectroscopy study of interface structure of hydrogen-intercalated graphene on n-type 4H-SiC(0001)

被引:11
|
作者
Maeda, Fumihiko [1 ]
Tanabe, Shinichi [1 ]
Isobe, Shingo [1 ,2 ]
Hibino, Hiroki [1 ]
机构
[1] Nippon Telegraph & Tel Co, NTT Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
[2] Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata 9402188, Japan
来源
PHYSICAL REVIEW B | 2013年 / 88卷 / 08期
基金
日本学术振兴会;
关键词
ELECTRON-IMPACT; PHOTOEMISSION; DISSOCIATION; SIC(0001); GRAPHITE; SURFACES; LAYERS;
D O I
10.1103/PhysRevB.88.085422
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The interface structure of hydrogen-intercalated graphene/SiC(0001), formed by annealing SiC substrates with the buffer layer at high temperature under atmospheric molecular hydrogen, was investigated by core-level photoelectron spectroscopy. The investigation of C 1s spectra, captured before and after the annealing at various temperatures in a vacuum, indicates that residual materials (hydrocarbon and hydrogen) stayed at the interface on the as-treated sample and remained there until annealing at around 700 degrees C. These residual materials would cause distortion of the graphene. The analysis of Si 2p photoelectron spectra reveals insufficient termination of Si-dangling bonds at the interface by hydrogen and that significant interface states remained. The interface states of Si dangling bonds are plausible origins of Fermi level pinning and would act as charged impurities. These distortion and charged impurities should degrade the electronic performance of graphene in this system.
引用
收藏
页数:6
相关论文
共 50 条
  • [31] Investigations of defects introduced in 4H-SiC n-type epitaxial layers by hydrogen DC plasma
    Ottaviani, L
    Yakimov, E
    Hidalgo, P
    Martinuzzi, S
    SILICON CARBIDE AND RELATED MATERIALS 2003, PRTS 1 AND 2, 2004, 457-460 : 509 - 512
  • [32] Photoelectron spectroscopy study of AlN films grown on n-type 6H-SiC by MOCVD
    F. Liang
    P. Chen
    D. G. Zhao
    D. S. Jiang
    Z. J. Zhao
    Z. S. Liu
    J. J. Zhu
    J. Yang
    W. Liu
    X. G. He
    X. J. Li
    X. Li
    S. T. Liu
    H. Yang
    J. P. Liu
    L. Q. Zhang
    Y. T. Zhang
    G. T. Du
    Applied Physics A, 2016, 122
  • [33] Photoelectron spectroscopy study of AlN films grown on n-type 6H-SiC by MOCVD
    Liang, F.
    Chen, P.
    Zhao, D. G.
    Jiang, D. S.
    Zhao, Z. J.
    Liu, Z. S.
    Zhu, J. J.
    Yang, J.
    Liu, W.
    He, X. G.
    Li, X. J.
    Li, X.
    Liu, S. T.
    Yang, H.
    Liu, J. P.
    Zhang, L. Q.
    Zhang, Y. T.
    Du, G. T.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2016, 122 (09):
  • [34] Interface properties of metal-oxide-semiconductor structures on n-type 6H and 4H-SiC
    Friedrichs, P
    Burte, EP
    Schomer, R
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) : 7814 - 7819
  • [35] Annealing study of a bistable defect in proton-implanted n-type 4H-SiC
    Nielsen, HK
    Martin, DM
    Lévêque, P
    Hallén, A
    Svensson, BG
    PHYSICA B-CONDENSED MATTER, 2003, 340 : 743 - 747
  • [36] Isochronal Annealing on n-type 4H-SiC Epitaxial Schottky Barriers and Investigation of Defect Levels by Deep Level Transient Spectroscopy
    Mannan, Mohammad A.
    Nguyen, Khai V.
    Mandal, Krishna C.
    2014 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE (NSS/MIC), 2014,
  • [37] Effects of wet-ROA on shallow interface traps of n-type 4H-SiC MOS capacitors
    朱巧智
    王德君
    Journal of Semiconductors, 2014, (02) : 36 - 39
  • [38] Study of Vertical Capacitance in an n-Type 4H-SiC Stepped Thick-Oxide Trench MOS Structure
    Guo, Zhiyu
    He, Zhi
    Wang, Fengxuan
    Wu, Jingmin
    Yang, Xiang
    Fan, Zhongchao
    Yang, Fuhua
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (08) : 4617 - 4623
  • [39] Effects of wet-ROA on shallow interface traps of n-type 4H-SiC MOS capacitors
    朱巧智
    王德君
    Journal of Semiconductors, 2014, 35 (02) : 36 - 39
  • [40] Effects of wet-ROA on shallow interface traps of n-type 4H-SiC MOS capacitors
    Zhu Qiaozhi
    Wang Dejun
    JOURNAL OF SEMICONDUCTORS, 2014, 35 (02)