A NOVEL SELF-POWERED PIEZOELECTRIC THREE-AXIS MEMS MAGNETIC SENSOR

被引：0
|
作者：
Yeh, Po-Chen [1 ]
Duan, Hao [1 ]
Chung, Tien-Kan [1 ,2 ]
机构：
[1] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu, Taiwan
[2] Natl Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu, Taiwan
来源：
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年
关键词：
Piezoelectric; magnetic sensor; three-axis; MEMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper demonstrates a self-powered piezoelectric three-axis MEMS magnetic sensor. The sensor consists of a silicon diaphragm, a PZT thin film with Pt top and bottom electrodes, and two patterned Ni thick films. When three-axial magnetic fields are applied to the sensor, alternating magnetic forces/torques are induced in two Ni films and consequently corresponding deformation/bending are produced in the diaphragm structure. The deformation/bending of the diaphragm generate the strains in the PZT thin film and thus produce corresponding different piezoelectric voltage responses. The testing results show the sensor successfully senses three-axial magnetic fields and has a decent linearity in the range of 5-70 Gauss.
引用
收藏
页码：1021 / 1024
页数：4
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