MEMS piezoelectric sensor for self-powered devices: A review

The bulkiness of traditional batteries, as well as frequent charging and electronic detritus caused by the replacement of old batteries, hinder the ability of low-powered electronic systems to become self-sustaining. Due to its ability to drive electricity from applied mechanical vibration, MEMS piezoelectric sensors are one of the most popular alternatives. These type of MEMS piezoelectric sensors have applications in a variety of fields due to their small size, low weight, and mass production. This article goes into great detail on MEMS piezoelectric sensors for self-powered devices. The MEMS piezoelectric sensor's design parameters, MEMS fabrication techniques, interface circuit, and output performance issues are all rigorously analysed and compared in this study. This article examines issues with energy storage, compatibility, and the effects of environmental variables like temperature and humidity on piezoelectric sensors in order to make devices more practical. For bioimplantable and wearable devices, the necessity of long-term experimentation and biocompatibility from a material standpoint is discussed. Additionally, by addressing MEMS piezoelectric sensors as a cutting-edge technology with the ability to produce self-sustaining low-powered electronic devices, this research delivers incisive conclusions on all aspects of piezoelectric sensor-related features.