Sputtering of the 1020 AISI steel in abnormal glow discharge

被引：0
|
作者：
Garcia Zuniga, J. A. [1 ]
Sarmiento Santos, A. [1 ]
Alvarez Luna, B. [1 ]
机构：
[1] Univ Pedag & Tecnol Colombia, Tunja, Colombia
来源：
4TH INTERNATIONAL MEETING FOR RESEARCHERS IN MATERIALS AND PLASMA TECHNOLOGY (4TH IMRMPT) | 2017年 / 935卷
关键词：
D O I：
10.1088/1742-6596/935/1/012019
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In all material treated in Sbnormal Glow Discharge (AGD) the phenomenon of sputtering occurs. In this work we study the sputtering suffered at different temperatures by AISI 1020 steel subjected to a DC discharge in two types of atmospheres. The steel samples were previously sanded until obtaining mirror brightness and subjected to the AGD plasma in the gaseous atmospheres of H2 and Ar. The temperature for each sputtering process was set in the range of 420 degrees C to 600 degrees C. In these samples the mass variation was measured and the yield sputtering processes was determined. Next, the simulation of the sputtering process was performed in the SRIM/ TRIM 2008 software, by adjusting sputtering yield computational computations to those experimentally measured, in order to determine the energy with which the responsible ions of the sputtering collide with studied target.
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页数：5
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