Methods and tools for the design of electrostatic micromotors.

被引:0
|
作者
Johansson, TB [1 ]
Hameyer, K [1 ]
Belmans, R [1 ]
机构
[1] KATHOLIEKE UNIV LEUVEN,DEPT ELECT ENGN,ESAT,ELEN,B-3001 LOUVAIN,BELGIUM
关键词
D O I
10.1109/EDTC.1996.494382
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:618 / 618
页数:1
相关论文
共 50 条
  • [11] IC-PROCESSED ELECTROSTATIC MICROMOTORS
    FAN, LS
    TAI, YC
    MULLER, RS
    SENSORS AND ACTUATORS, 1989, 20 (1-2): : 41 - 47
  • [12] Design and fabrication of high torque electrostatic micromotors using micromachining of thin polysilicon sheets
    Minotti, P
    Langlet, P
    Bourbon, G
    Fujita, H
    Masuzawa, T
    SMART ELECTRONICS AND MEMS, 1997, 3242 : 354 - 363
  • [13] High-energy capacitance electrostatic micromotors
    Baginsky, IL
    Kostsov, EG
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (02) : 190 - 200
  • [14] Micromotors as tools for efficient water decontamination
    Garcia, Diana Vilela
    Parmar, Jemish
    Sanchez, Samuel
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
  • [15] IC-PROCESSED ELECTROSTATIC SYNCHRONOUS MICROMOTORS
    TAI, YC
    MULLER, RS
    SENSORS AND ACTUATORS, 1989, 20 (1-2): : 49 - 55
  • [16] TECHNIQUE FOR FINDING THE OPTIMUM GEOMETRY OF ELECTROSTATIC MICROMOTORS
    JOHANSSON, TB
    VANDESSEL, M
    BELMANS, R
    GEYSEN, W
    IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS, 1994, 30 (04) : 912 - 919
  • [17] Investigation of cylindrical and conical electrostatic wobble micromotors
    Sarros, T
    Chew, EC
    Crase, S
    Tay, BK
    Soong, WL
    MICROELECTRONICS JOURNAL, 2002, 33 (1-2) : 129 - 140
  • [18] Planar electrostatic micromotors on the basis of the ferroelectric films
    Dyatlov, VL
    Kostsov, EG
    INTEGRATED FERROELECTRICS, 1999, 23 (1-4) : 149 - 160
  • [19] Ferroelectric-based electrostatic micromotors with nanometer gaps
    Kostsov, Edward G.
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (12) : 2294 - 2298
  • [20] Study the influence of geometric parameters on the torque of electrostatic micromotors
    V. Behjat
    A. Vahedi
    Electrical Engineering, 2006, 89 : 61 - 65