Comparative hot-pressing study of amorphous and crystalline silicon nitride powders

被引:0
|
作者
Szepvolgyi, J [1 ]
Mohai, I [1 ]
机构
[1] HUNGARIAN ACAD SCI,INORGAN CHEM RES LAB,H-1112 BUDAPEST,HUNGARY
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中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
Hot pressing behaviour of amorphous and crystalline silicon nitride powders produced from SiCl4 and NH3 precursors in an RF thermal plasma was studied as compared to crystalline commercial powders. Correlations were established between the properties of powders and characteristics of hot pressed compacts. Chemical and morphological changes, along with phase transformations were interpreted. Conclusions were drawn on the kinetics of hot pressing by the computer evaluation of hot pressing data.
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页码:89 / 107
页数:19
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