A monolithic CMOS 3-axis accelerometer combining piezoresistive and beat transfer effects

被引：0
|
作者：
Chaehoi, A [1 ]
Latorre, L [1 ]
Mailly, F [1 ]
Nouet, P [1 ]
机构：
[1] Lab Informat Robot & Microelect Montpellier, Montpellier, France
来源：
2005 PhD Research in Microelectronics and Electronics, Vols 1 and 2, Proceedings | 2005年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the analytical modelling and experimental data of a novel monolithic 3-axis CMOS accelerometer. The proposed sensor exhibit a sensitivity of 24mV/g and a resolution of 1g in out of plane detection and a sensitivity of 370mV/g and a resolution of 30mg in lateral measurement.
引用
收藏
页码：219 / 222
页数：4
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