Micro spectral measurement of micro integrated filters

Theory of micro spectral transmittance measurement and its characteristics have been analyzed. Measurement procedures and data processing method have been introduced. Micro spectral transmittance of micro integrated filters has been measured using PerkinElmer Lambda 1050 spectrophotometer with the combination of a Schwarzschild optical system microscope accessory, and the measured quantitative analysis results have been obtained. The incidence focused light spot size is about 20*40 um(2). At last, micro spectral transmittance results for micro integrated filters have been compared with the spectral transmittance for large size samples, which are fabricated under the same condition and measured at normal incidence. The focused incidence for micro spectral measurement will cause a wavelength shift towards the shorter and a deformation transmittance curve, but those changes are in agreement with their theoretical simulations.