[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Minist Educ,Key Lab Thin Film & Microfabricat, Shanghai 200240, Peoples R China
[2] Lanzhou Univ, Sch Phys Sci & Technol, Inst Nanosci & Nanotechnol, Lanzhou 730000, Gansu, Peoples R China
[3] Xidian Univ, Sch Adv Mat & Nanotechnol, Xian 710071, Shaanxi, Peoples R China