Surface engineering of diamond tips for improved field electron emission

Results are reported on the study of surface engineering of diamond microtips for improved field electron emission. Two-dimensional (2D) arrays of diamond pyramids were prepared using a molding technique. As-grown diamond pyramids of 3 and 9 mum in size with sharp apexes were insulating and showed a relatively poor field electron emission. Several ways are examined to provide an electrical conductivity of diamond in order to supply electrons for the emission: diamond boron doping, partial graphitization / amorphization by nitrogen ion implantation and / or high temperature annealing, formation of built-in conductive metal layers. A perceptible improvement of surface electrical conductivity and reduction of field electron emission thresholds down to 10 V / mum was observed. For explanation of the results it was enough to take into account only the geometric field enhancement on pyramids apexes. (C) 2001 Elsevier Science B.V. All rights reserved.