Critical dimension measurement using new scanning mode and aligned carbon nanotube scanning probe microscope tip

被引：14
|
作者：
Yasutake, M [1 ]
Watanabe, K [1 ]
Wakiyama, S [1 ]
Yamaoka, T [1 ]
机构：
[1] SII Nanotechnol Inc, Shizuoka 4101393, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 3B期
关键词：
atomic force microscopy; carbon nanotube; critical dimension measurement;
D O I：
10.1143/JJAP.45.1970
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have developed a new scanning mode and an aligned carbon nanotube tip for atomic force microscopy (AFM) for measuring the critical dimension of deep structures. The aligned carbon nanotube (A-CNT) was assembled in the scanning electron microscope (SEM) chamber. The diameter of the tip is uniformly around 20 nm and the tip attachment angle is within +/- 1.5 degrees to the sample normal. The aspect ratio (length/diameter) of the tip is greater than 30. The new scanning mode is composed of two functions, namely transporting the tip along the steep trench structure and detecting the sample surface. This mode can faithfully trace the steep side wall using a flexible CNT tip without damaging the tip. The critical dimension (CD) measurements of the shallow trench isolation (STI) were performed using the newly developed scanning mode and the A-CNT tip.
引用
收藏
页码：1970 / 1973
页数：4
相关论文
共 50 条
  • [1] Scanning probe microscope tip with carbon nanotube truss
    Akita, S
    Nakayama, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (7B): : 4499 - 4501
  • [2] Fabrication of individual aligned carbon nanotube for scanning probe microscope
    Tseng, SC
    Tsai, CH
    Lee, CH
    Tsai, CH
    Chen, SP
    Liang, CC
    Hsieh, GW
    Line, WC
    [J]. SECOND CONFERENCE ON MICROELECTRONICS, MICROSYSTEMS AND NANOTECHNOLOGY, 2005, 10 : 186 - 189
  • [3] Carbon nanotube tip for scanning tunneling microscope
    Mizutani, W
    Choi, N
    Uchihashi, T
    Tokumoto, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (6B): : 4328 - 4330
  • [4] Precision carbon nanotube tip for critical dimension measurement with atomic force microscope
    Park, BC
    Jung, KY
    Hong, J
    Song, WY
    O, BH
    Kim, JA
    [J]. Metrology, Inspection, and Process Control for Microlithography XIX, Pts 1-3, 2005, 5752 : 412 - 419
  • [5] Scanning probe microscope lithography of silicon using a combination of a carbon nanotube tip and a polysilane film as a mask
    Okazaki, A
    Akita, S
    Nakayama, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (7B): : 4973 - 4975
  • [6] Direct attachment of carbon nanotube on scanning probe tip using dielectrophoresis
    Han, CS
    Lee, HW
    Ryu, SH
    Kim, SH
    Kwak, YK
    [J]. BIOMEMS AND NANOTECHNOLOGY, 2003, 5275 : 239 - 246
  • [7] Scanning near field microscope with a carbon nanotube as a probe
    Kolerov, A. N.
    Onishchenko, D. V.
    [J]. JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2011, 5 (06) : 1168 - 1172
  • [8] Scanning near field microscope with a carbon nanotube as a probe
    A. N. Kolerov
    D. V. Onishchenko
    [J]. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2011, 5 : 1168 - 1172
  • [9] CRITICAL DIMENSION MEASUREMENT IN THE SCANNING ELECTRON-MICROSCOPE
    POSTEK, MT
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 480 : 109 - 119
  • [10] Critical dimension measurement in nanometer scale by using scanning probe microscopy
    Nagase, M
    Namatsu, H
    Kurihara, K
    Makino, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (07): : 4166 - 4174
12345