Influence of Substrate Temperature on the Characteristics of Zinc Oxide Thin Films Deposited by Magnetron Sputtering

被引：0
|
作者：
Gu, J. H. [2 ]
Zhong, Z. Y. [1 ]
He, X. [1 ]
Hou, J. [1 ]
Yang, C. Y. [1 ]
机构：
[1] South Cent Univ Nationalities SCUN, Coll Elect Informat Engn, Wuhan 430074, Peoples R China
[2] South Cent Univ Nationalities SCUN, Ctr Comp & Exp, Wuhan 430074, Peoples R China
来源：
PROGRESS IN NEW MATERIALS AND MECHANICS RESEARCH | 2012年 / 502卷
关键词：
Zinc oxide; Magnetron sputtering; Microstructure; Optical properties; LIGHT-EMITTING-DIODES; DOPED ZNO FILMS; SENSORS; DEVICES;
D O I：
10.4028/www.scientific.net/AMR.502.111
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Zinc oxide (ZnO) thin films were deposited by RF magnetron sputtering on glass substrates employing a sintered ceramic target and pure argon gas. The influence of substrate temperature on microstructure and optical characteristics of the deposited films were investigated by X-ray diffractometer (XRD) and spectrophotometer. The results demonstrate that all the ZnO films have preferred orientation along (002) direction. The substrate temperature significantly affects the crystalline quality and optical characteristics of the ZnO thin films. With the increase of substrate temperature, the mean grain size, lattice spacing and optical bandgap of the films increase, the dislocation density and micro strain decrease, and the average transmitance in the wavelength range of the visible spectrum also increases.
引用
收藏
页码：111 / +
页数：2
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