Temperature-dependent bias-stress-induced electrical instability of amorphous indium-gallium-zinc-oxide thin-film transistors

被引:8
|
作者
Qian Hui-Min [1 ,2 ,3 ]
Yu Guang [1 ,2 ,3 ]
Lu Hai [1 ,2 ,3 ]
Wu Chen-Fei [1 ,2 ,3 ]
Tang Lan-Feng [1 ,2 ,3 ]
Zhou Dong [1 ,2 ,3 ]
Ren Fang-Fang [1 ,2 ,3 ]
Zhang Rong [1 ,2 ,3 ]
Zheng You-Liao [1 ,2 ,3 ]
Huang Xiao-Ming [4 ]
机构
[1] Nanjing Univ, Jiangsu Prov Key Lab Adv Photon & Elect Mat, Nanjing 210093, Jiangsu, Peoples R China
[2] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
[3] Nanjing Univ, Collaborat Innovat Ctr Adv Microstruct, Nanjing 210093, Jiangsu, Peoples R China
[4] Nanjing Univ Posts & Telecommun, Peter Grunberg Res Ctr, Nanjing 210003, Jiangsu, Peoples R China
关键词
amorphous indium gallium zinc oxide; thin-film transistors; positive bias stress; trapping model; interface states; ROOM-TEMPERATURE; SILICON;
D O I
10.1088/1674-1056/24/7/077307
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The time and temperature dependence of threshold voltage shift under positive-bias stress (PBS) and the following recovery process are investigated in amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors. It is found that the time dependence of threshold voltage shift can be well described by a stretched exponential equation in which the time constant tau is found to be temperature dependent. Based on Arrhenius plots, an average effective energy barrier E-tau stress = 0.72 eV for the PBS process and an average effective energy barrier E-tau recovery = 0.58 eV for the recovery process are extracted respectively. A charge trapping/detrapping model is used to explain the threshold voltage shift in both the PBS and the recovery process. The influence of gate bias stress on transistor performance is one of the most critical issues for practical device development.
引用
收藏
页数:5
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