Temperature-dependent bias-stress-induced electrical instability of amorphous indium-gallium-zinc-oxide thin-film transistors

被引:8
|
作者
Qian Hui-Min [1 ,2 ,3 ]
Yu Guang [1 ,2 ,3 ]
Lu Hai [1 ,2 ,3 ]
Wu Chen-Fei [1 ,2 ,3 ]
Tang Lan-Feng [1 ,2 ,3 ]
Zhou Dong [1 ,2 ,3 ]
Ren Fang-Fang [1 ,2 ,3 ]
Zhang Rong [1 ,2 ,3 ]
Zheng You-Liao [1 ,2 ,3 ]
Huang Xiao-Ming [4 ]
机构
[1] Nanjing Univ, Jiangsu Prov Key Lab Adv Photon & Elect Mat, Nanjing 210093, Jiangsu, Peoples R China
[2] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
[3] Nanjing Univ, Collaborat Innovat Ctr Adv Microstruct, Nanjing 210093, Jiangsu, Peoples R China
[4] Nanjing Univ Posts & Telecommun, Peter Grunberg Res Ctr, Nanjing 210003, Jiangsu, Peoples R China
关键词
amorphous indium gallium zinc oxide; thin-film transistors; positive bias stress; trapping model; interface states; ROOM-TEMPERATURE; SILICON;
D O I
10.1088/1674-1056/24/7/077307
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The time and temperature dependence of threshold voltage shift under positive-bias stress (PBS) and the following recovery process are investigated in amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors. It is found that the time dependence of threshold voltage shift can be well described by a stretched exponential equation in which the time constant tau is found to be temperature dependent. Based on Arrhenius plots, an average effective energy barrier E-tau stress = 0.72 eV for the PBS process and an average effective energy barrier E-tau recovery = 0.58 eV for the recovery process are extracted respectively. A charge trapping/detrapping model is used to explain the threshold voltage shift in both the PBS and the recovery process. The influence of gate bias stress on transistor performance is one of the most critical issues for practical device development.
引用
收藏
页数:5
相关论文
共 50 条
  • [1] Temperature-dependent bias-stress-induced electrical instability of amorphous indium-gallium-zinc-oxide thin-film transistors
    钱慧敏
    于广
    陆海
    武辰飞
    汤兰凤
    周东
    任芳芳
    张荣
    郑有炓
    黄晓明
    Chinese Physics B, 2015, (07) : 465 - 469
  • [2] Light induced instabilities in amorphous indium-gallium-zinc-oxide thin-film transistors
    Chowdhury, Md Delwar Hossain
    Migliorato, Piero
    Jang, Jin
    APPLIED PHYSICS LETTERS, 2010, 97 (17)
  • [3] Temperature-Dependent Electrical Characterization of Amorphous Indium Zinc Oxide Thin-Film Transistors
    Heo, Keun
    Cho, Kyung-Sang
    Choi, Jun Young
    Han, Sangmin
    Yu, Yun Seop
    Park, Yonmook
    Yoo, Gwangwe
    Park, Jin-Hong
    Hwang, Sung Woo
    Lee, Sang Yeol
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (08) : 3183 - 3188
  • [4] Instability dependent upon bias and temperature stress in amorphous-indium gallium zinc oxide (a-IGZO) thin-film transistors
    Choi, Kwang-Il
    Nam, Dong-Ho
    Park, Jeong-Gyu
    Park, Sung-Su
    Choi, Won-Ho
    Han, In-Shik
    Jeong, Jae-Kyeong
    Lee, Hi-Deok
    Lee, Ga-Won
    JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2010, 18 (01) : 108 - 112
  • [5] Effect of annealing time on bias stress and light-induced instabilities in amorphous indium-gallium-zinc-oxide thin-film transistors
    Chowdhury, Md Delwar Hossain
    Ryu, Sang Hyun
    Migliorato, Piero
    Jang, Jin
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (11)
  • [6] Electrostatic discharge robustness of amorphous indium-gallium-zinc-oxide thin-film transistors
    Simicic, Marko
    Ashif, Nowab Reza
    Hellings, Geert
    Chen, Shih-Hung
    Nag, Manoj
    Kronemeijer, Auke Jisk
    Myny, Kris
    Linten, Dimitri
    MICROELECTRONICS RELIABILITY, 2020, 108
  • [7] Influences of Oxygen Plasma Posttreatment on Electrical Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin-Film Transistors
    Lee, Jae-Yun
    Tarsoly, Gergely
    Choi, Seung-Gon
    Ryu, Heung-Gyoon
    Kim, Sung-Jin
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2021, 218 (19):
  • [8] Dependence of Light-Accelerated Instability on Bias and Environment in Amorphous Indium-Gallium-Zinc-Oxide Thin Film Transistors
    Chen, Yu-Chun
    Chang, Ting-Chang
    Li, Hung-Wei
    Chung, Wan-Fang
    Hsieh, Tien-Yu
    Chen, Yi-Hsien
    Tsai, Wu-Wei
    Chiang, Wen-Jen
    Yan, Jing-Yi
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2013, 2 (04) : Q74 - Q76
  • [9] Effect of Oxygen Partial Pressure on Electrical Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin-Film Transistors
    Chang, Sheng-Po
    Yang, Tsung-Han
    Ho, Chao-Jen
    Chang, Shoou-Jinn
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2013, 8 (04) : 361 - 365
  • [10] Migration of indium ions in amorphous indium-gallium-zinc-oxide thin film transistors
    Kang, Jiyeon
    Moon, Kyeong-Ju
    Lee, Tae Il
    Lee, Woong
    Myoung, Jae-Min
    APPLIED SURFACE SCIENCE, 2012, 258 (08) : 3509 - 3512