Implications of the figure of merit in environmental SEM

A proper understanding of the behavior of gas flow in an environmental scanning electron microscope together with its interactions with the electron beam is important for work in this field. Further discussion on a figure of merit introduced recently is reported together with a critical review of some prior literature, with particular attention to issues found in error. A concise attempt is made to consolidate the relevant terminology in order to avoid further misinterpretations in this field. (c) 2012 Elsevier Ltd. All rights reserved.