Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser

被引：0

作者：

Guo, X. B. ^{[1
]}

Ding, J. N. ^{[1
]}

Wang, S. Y. ^{[1
]}

Qiu, J. H. ^{[1
]}

Kan, B. ^{[1
]}

Yuan, N. Y. ^{[1
]}

机构：

[1] Changzhou Univ, Ctr Low Dimens Mat Micronano Devices & Syst, Changzhou, Peoples R China

来源：

2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013) | 2013年

关键词：

black silicon; micro-nano structures; mechanical durability; TRIBOLOGICAL PROPERTIES; SCRATCH RESISTANCE; BEHAVIOR; FILMS; LUBRICATION; PERFORMANCE; IMPROVEMENT; ADHESION; WEAR;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Hierarchical micro-nano structure surface on silicon is directly produced by femtosecond laser in air. The laser processing reduces the reflectance of silicon significantly in the studied wavelength range (0.25-1.1 mu m). Mechanical durability of the micro-nano structure surface has been studied. It is indicated that wear is significantly reduced under water saturation lubrication. Moreover surface modification with Perfluoropolyether improves its mechanical durability.

引用

页码：1218 / 1221

页数：4

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