High-speed traveling-wave electrodes for polymeric electro-optic modulators

被引:2
|
作者
Han, Z [1 ]
Tang, SN [1 ]
An, DC [1 ]
Sun, L [1 ]
Lu, XJ [1 ]
Shi, Z [1 ]
Zhou, Q [1 ]
Chen, RT [1 ]
机构
[1] Univ Texas, Microelect Res Ctr, Austin, TX 78712 USA
来源
关键词
D O I
10.1117/12.344624
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
A detailed design and fabrication procedure of high-speed traveling-wave (TW) electrodes for EO polymer-based modulator has been developed. Design consideration, thick photoresist deposition and electroplating are specially focused on. A lot of practical experiences are introduced as well. This kind of modulator can be used in satellite receiver systems, remote connection of cellular radio systems,and LANs.
引用
收藏
页码:354 / 362
页数:9
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