Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

被引：1
|
作者：
Andruczyk, Daniel [1 ]
Sporre, John [1 ]
Elg, Dan [1 ]
Cho, Tae [1 ]
Ruzic, David N. [1 ]
机构：
[1] Univ Illinois, Ctr Plasma Mat Interact, Talbot Lab 213, Urbana, IL 61801 USA
来源：
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY III | 2012年 / 8322卷
关键词：
Actinic; debris mitigation; EUV lithography;
D O I：
10.1117/12.916437
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The Center for Plasma-Material Interactions has developed a detector capable of diagnosing the energetic ion and neutral spectrums emanating from extreme ultraviolet light sources. This tool has been used in the past for high-power output sources, but it is readily evident that actinic inspections tools require the use of debris mitigation analyzers. Using this tool, manufacturers can optimize the use of debris mitigation techniques, as well as analyze the effects brightness increases have on tool lifetime.
引用
收藏
页数：14
相关论文
共 50 条
  • [1] Coherent light sources reach the extreme-ultraviolet
    Hecht, Jeff
    [J]. LASER FOCUS WORLD, 2006, 42 (12): : 69 - +
  • [2] Design of fully spatially coherent extreme-ultraviolet light sources
    Libertun, AR
    Zhang, X
    Paul, A
    Gagnon, E
    Popmintchev, T
    Backus, S
    Murnane, MM
    Kapteyn, HC
    Christov, IP
    [J]. APPLIED PHYSICS LETTERS, 2004, 84 (19) : 3903 - 3905
  • [3] Tailoring extreme-ultraviolet light
    Taro Sekikawa
    Kenichi L. Ishikawa
    [J]. Nature Photonics, 2017, 11 : 209 - 210
  • [4] EXTREME-ULTRAVIOLET SOURCES Higher harmonics with plasmonics
    Costello, John
    [J]. NATURE PHOTONICS, 2011, 5 (11) : 643 - 644
  • [5] Atom Probe Tomography with Extreme-Ultraviolet Light
    Miaja-Avila, Luis
    Chiaramonti, Ann N.
    Blanchard, Paul T.
    Sanford, Norman A.
    Diercks, David R.
    Gorman, Brian P.
    [J]. 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019,
  • [6] ULTRAFAST PHOTONICS Tailoring extreme-ultraviolet light
    Sekikawa, Taro
    Ishikawa, Kenichi L.
    [J]. NATURE PHOTONICS, 2017, 11 (04) : 209 - 210
  • [7] Extreme-ultraviolet light generation in plasmonic nanostructures
    Sivis, M.
    Duwe, M.
    Abel, B.
    Ropers, C.
    [J]. NATURE PHYSICS, 2013, 9 (05) : 304 - 309
  • [8] Extreme-ultraviolet light generation in plasmonic nanostructures
    Sivis M.
    Duwe M.
    Abel B.
    Ropers C.
    [J]. Nature Physics, 2013, 9 (5) : 304 - 309
  • [9] ENERGETIC X-RAY AND EXTREME-ULTRAVIOLET FLASHES OF SOLAR FLARES
    DONNELLY, RF
    [J]. ASTROPHYSICAL JOURNAL, 1969, 158 (3P2): : L165 - &
  • [10] STUDY OF SOLAR ENERGETIC PARTICLE ASSOCIATIONS WITH CORONAL EXTREME-ULTRAVIOLET WAVES
    Park, Jinhye
    Innes, D. E.
    Bucik, R.
    Moon, Y. -J.
    Kahler, S. W.
    [J]. ASTROPHYSICAL JOURNAL, 2015, 808 (01):
12345