Manufacturability and sustainability analysis of nano-scale manufacturing

被引:0
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作者
Yuan, Chris Y. [1 ]
Dornfeld, David [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:71 / 71
页数:1
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