Manufacturability and sustainability analysis of nano-scale manufacturing

被引:0
|
作者
Yuan, Chris Y. [1 ]
Dornfeld, David [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:71 / 71
页数:1
相关论文
共 50 条
  • [1] Design-for-Manufacturability for Nano-Scale CMOS Technology
    Li, Yongfu
    2023 IEEE ASIA PACIFIC CONFERENCE ON POSTGRADUATE RESEARCH IN MICROELECTRONICS AND ELECTRONICS, PRIMEASIA 2023, 2024, : XVI - XVI
  • [2] Controlling high-throughput manufacturing at the nano-scale
    Cooper, Khershed P.
    INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VII, 2013, 8819
  • [3] Few electron memories: Finding the compromise between performance, variability and manufacturability at the nano-scale
    Silva, H
    Kim, MK
    Kumar, A
    Avci, U
    Tiwari, S
    2003 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 2003, : 271 - 274
  • [4] Nano-scale analysis of antimicrobial peptides
    Ray, Santanu
    Rakowska, Paulina D.
    Jiang, Haibo
    Grovenor, Chris R. M.
    Lamarre, Baptiste
    Ryadnov, Maxim G.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2013, 245
  • [5] Quality assurance in nano-scale analysis
    Senoner, M
    Unger, W
    Reiners, G
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (06): : 919 - 921
  • [6] Quality assurance in nano-scale analysis
    M. Senoner
    W. Unger
    G. Reiners
    Applied Physics A, 2003, 76 : 919 - 921
  • [7] Nano-scale defect analysis by BEEM
    von Känel, H
    Meyer, T
    JOURNAL OF CRYSTAL GROWTH, 2000, 210 (1-3) : 401 - 407
  • [8] A hybrid life cycle inventory of nano-scale semiconductor manufacturing
    Krishnan, Nikhil
    Boyd, Sarah
    Somani, Ajay
    Raoux, Sebastien
    Clark, Daniel
    Dornfeld, David
    ENVIRONMENTAL SCIENCE & TECHNOLOGY, 2008, 42 (08) : 3069 - 3075
  • [9] Production of Microchannel Plates Using Nano-Scale Additive Manufacturing
    Ertley, Camden D.
    Bielinski, Ashley R.
    Elam, Jeffrey W.
    Mane, Anil U.
    Martinson, Alex B. F.
    Mello, Kevin
    Menon, Prabhjot M.
    Moore, Jerome F.
    Pellin, Michael J.
    Wagner, Robert G.
    SPACE TELESCOPES AND INSTRUMENTATION 2024: ULTRAVIOLET TO GAMMA RAY, PT 1, 2024, 13093
  • [10] Dependability analysis of nano-scale FinFET circuits
    Wang, Feng
    Xie, Yuan
    Bernstein, Kerry
    Luo, Yan
    IEEE COMPUTER SOCIETY ANNUAL SYMPOSIUM ON VLSI, PROCEEDINGS: EMERGING VLSI TECHNOLOGIES AND ARCHITECTURES, 2006, : 399 - +