Influence of Ti target current on microstructure and properties of Ti-doped graphite-like carbon films

被引：13

作者：

Wang Yong-xin ^{[1
,2
]}

Wang Li-ping ^{[1
]}

Xue Qun-ji ^{[1
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China

[2] Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

来源：

TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA | 2012年 / 22卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Ti-doped graphite-like carbon film; microstructure; tribological performance; target current; AMORPHOUS-CARBON; DLC COATINGS; TRIBOLOGICAL PERFORMANCE; MECHANICAL-PROPERTIES; ION-IMPLANTATION; WEAR; FRICTION; WATER; SIMULATION; BEHAVIORS;

D O I：

10.1016/S1003-6326(11)61328-9

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

Ti-doped graphite-like carbon (Ti-GLC) films were synthesized successfully by magnetron sputtering technique. The compositions, microstructures and properties of the Ti-doped GLC films dependent on the parameter of Ti target current were systemically investigated by Raman spectra, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation and ball-on-disk tribometer. With the increase of the Ti target current, the ratio of sp(2) bond and the content of Ti as well as the film hardness and compressive internal stress increase, but the high content of the Ti would result in the loose film due to the formation of the squamose structure. Less incorporated Ti reduces the friction of the GLC film in dry-sliding condition, while pure GLC film exhibits the lowest friction coefficient in water-lubricated condition. Ti-GLC film deposited with low Ti target current shows high wear resistance in both dry-sliding and water-lubricated conditions.

引用

页码：1372 / 1380

页数：9

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