Growth of Ultrathin Ag Films on TaNx Layer and Their Optical Properties

被引：7
|
作者：
Akepati, Sivasankar Reddy [1 ]
Cho, Hyun-chul [2 ]
Lee, Kee-Sun [1 ,2 ]
机构：
[1] Green Home Energy Technol Ctr, Cheonan, South Korea
[2] Kongju Natl Univ, Dept Energy Syst, Cheonan, South Korea
来源：
ELECTRONIC MATERIALS LETTERS | 2013年 / 9卷 / 02期
基金：
新加坡国家研究基金会;
关键词：
ultrathin Ag; TaNx; sputtering; film growth; low emissivity; LOW-EMISSIVITY COATINGS; THIN-FILMS; SILVER FILMS; THICKNESS; PARTICLES; STABILITY;
D O I：
10.1007/s13391-013-2138-y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The growth and electrical-optical properties of dc-magnetron-sputtered ultrathin silver (Ag) films on glass and TaNx/glass were investigated by using scanning electron microscopy, transmission electron microscopy, auger electron spectroscopy (AES), UV-Vis-NTR. spectrometry and the four-point probe method. The agglomeration and inter-diffusion of Ag was effectively reduced by the TaNx layer, and Ag films on TaNx (10 nm)/glass formed a smooth and dense surface. TaN film deposited on the Ag/TaNx/glass also shows a uniform microstructure. The Ag film in the TaN, interlayer has at least three times lower resistance than that of Ag/glass, which can be attributed to the growth mode of the Ag films. The optical properties of the Ag films were greatly improved by the TaNx layer. In the near infrared region, Ag/TaNx/Iglass and TaNx/Ag/TaNx/glass films showed a drastic decrease in transmittance compared to Ag/glass.
引用
收藏
页码：231 / 235
页数：5
相关论文
共 50 条
  • [21] Layer structure of ultrathin Ag films on Ni/Pt(111)
    Ho, H. Y.
    Chen, Y. J.
    Su, C. W.
    Chen, R. H.
    Shern, C. S.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (04): : 1020 - 1023
  • [22] Layer-by-layer structure in ultrathin aniline and pyridine films on Ag(111)
    Yang, MC
    Rockey, TJ
    Pursell, D
    Dai, HL
    JOURNAL OF PHYSICAL CHEMISTRY B, 2001, 105 (48): : 11945 - 11948
  • [23] Ultrathin Hybrid Films of Polyoxohydroxy Clusters and Proteins: Layer-by-Layer Assembly and Their Optical and Mechanical Properties
    Yan, You-Xian
    Yao, Hong-Bin
    Smart, Scott E.
    Mao, Li-Bo
    Hu, Wei
    Yuan, Shaotang
    Du-Thumm, Laurence
    Masters, James G.
    Yu, Shu-Hong
    Pan, Long
    LANGMUIR, 2014, 30 (18) : 5248 - 5255
  • [24] Fabrication, optical properties, and modeling of gold nanoparticle/polyelectrolyte layer-by-layer ultrathin films.
    Xu, RS
    Baba, A
    Locklin, J
    Tamada, K
    Advincula, RC
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 229 : U962 - U962
  • [25] Vibrational properties of ultrathin PTCDA films on Ag(110)
    Tautz, FS
    Sloboshanin, S
    Schaefer, JA
    Scholz, R
    Shklover, V
    Sokolowski, M
    Umbach, E
    PHYSICAL REVIEW B, 2000, 61 (24) : 16933 - 16947
  • [26] Growth of Ag-Sb-S thin films and their optical properties
    Laubis, C
    Henrion, W
    Beier, J
    Dittrich, H
    Lux-Steiner, MC
    TERNARY AND MULTINARY COMPOUNDS, 1998, 152 : 289 - 292
  • [27] Optical Properties of Ultrathin Plasmonic TiN Films
    Shah, Deesha
    Reddy, Harsha
    Kinsey, Nathaniel
    Shalaev, Vladimir M.
    Boltasseva, Alexandra
    2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2017,
  • [28] Optical and transport properties of ultrathin in quantized films
    Hnatyuk, V.
    Strozak, M.
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2007, 19 (39)
  • [29] Optical Properties of Plasmonic Ultrathin TiN Films
    Shah, Deesha
    Reddy, Harsha
    Kinsey, Nathaniel
    Shalaev, Vladimir M.
    Boltasseva, Alexandra
    ADVANCED OPTICAL MATERIALS, 2017, 5 (13):
  • [30] Effects of interfacial structure on the magnetic properties of ultrathin Fe/Pt(111) films with Ag buffer layer
    Chen, Yao-Jung
    Chang, Chi-Ching
    Ho, Huei-Ying
    Tsay, Jyh-Shen
    THIN SOLID FILMS, 2011, 519 (23) : 8343 - 8346
12345