Growth of Ultrathin Ag Films on TaNx Layer and Their Optical Properties

被引：7
|
作者：
Akepati, Sivasankar Reddy [1 ]
Cho, Hyun-chul [2 ]
Lee, Kee-Sun [1 ,2 ]
机构：
[1] Green Home Energy Technol Ctr, Cheonan, South Korea
[2] Kongju Natl Univ, Dept Energy Syst, Cheonan, South Korea
来源：
ELECTRONIC MATERIALS LETTERS | 2013年 / 9卷 / 02期
基金：
新加坡国家研究基金会;
关键词：
ultrathin Ag; TaNx; sputtering; film growth; low emissivity; LOW-EMISSIVITY COATINGS; THIN-FILMS; SILVER FILMS; THICKNESS; PARTICLES; STABILITY;
D O I：
10.1007/s13391-013-2138-y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The growth and electrical-optical properties of dc-magnetron-sputtered ultrathin silver (Ag) films on glass and TaNx/glass were investigated by using scanning electron microscopy, transmission electron microscopy, auger electron spectroscopy (AES), UV-Vis-NTR. spectrometry and the four-point probe method. The agglomeration and inter-diffusion of Ag was effectively reduced by the TaNx layer, and Ag films on TaNx (10 nm)/glass formed a smooth and dense surface. TaN film deposited on the Ag/TaNx/glass also shows a uniform microstructure. The Ag film in the TaN, interlayer has at least three times lower resistance than that of Ag/glass, which can be attributed to the growth mode of the Ag films. The optical properties of the Ag films were greatly improved by the TaNx layer. In the near infrared region, Ag/TaNx/Iglass and TaNx/Ag/TaNx/glass films showed a drastic decrease in transmittance compared to Ag/glass.
引用
收藏
页码：231 / 235
页数：5
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