A compact 2.45 GHz ECR ion source with permanent magnets for material science

被引：4
|
作者：
Tojyo, E [1 ]
Katayama, I [1 ]
Jeong, SC [1 ]
Oyaizu, M [1 ]
Ishiyama, H [1 ]
Kawakami, H [1 ]
Enomoto, K [1 ]
Miyatake, H [1 ]
机构：
[1] High Energy Accelerator Res Org KEK, Tsukuba, Ibaraki 3050801, Japan
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2002年 / 73卷 / 02期
关键词：
D O I：
10.1063/1.1429318
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A compact 2.45 GHz electron cyclotron resonance (ECR) ion source has been developed as an etching device for diffusion experiments in the solid-state matter. This source is a little bit different from those of a usual industrial ECR device, i.e., it is to extract high intensity beams from a relatively small single hole with low emittance under the extraction voltage of several kV and high vacuum. Summary of the design, manufacture, and the initial beam extraction tests are described. (C) 2002 American Institute of Physics.
引用
收藏
页码：586 / 588
页数：3
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