CAPACITIVE TACTILE SENSOR FOR QUADRUPLED SPATIAL RESOLUTION

被引：0

作者：

Chandra, M. ^{[1
]}

Chen, R. ^{[1
,2
]}

Lo, C-Y ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 300, Taiwan

[2] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

关键词：

Angle detection; capacitive tactile sensor; spatial resolution;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Unlike conventional arrangement of capacitors on the xy-plane in tactile sensors, this work stacked two capacitors in the z-direction with a shared electrode. This novel arrangement reduced the required projective area of the capacitors from four to one, quadrupled the spatial resolution of the tactile sensor without losing its functionality and sensitivity. Theoretical design, numerical simulation, fabrication, and analysis were thoroughly conducted in this work. The proposed capacitive tactile sensor and its results prevailed conventional planar ones not only in structure and fabrication simplicity but also in alleviation of angle detection error.

引用

页码：504 / 507

页数：4

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