Thin-film composite resonators on crystalline substrates

被引:0
|
作者
Ballato, A [1 ]
机构
[1] USA, Res Dev & Evaluat Command, CERDEC, Ft Monmouth, NJ 07703 USA
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中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Telecommunications systems depend on high stability frequency sources. For mobile uses such as cell phones, size and cost are severe additional constraints. We describe a class of composite piezoresonators that are comprised of piezoelectric thin films deposited on crystalline plate substrates 11] oriented to obtain very low temperature coefficients of frequency (TCFs) for the composite structure. Specifically described are high-frequency bulk acoustic wave resonators (HBARs) comprised of piezoelectric thin films on AT- and BT-cut quartz substrates. An example design for a 2.1 GHz composite resonator is provided.
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收藏
页码:2128 / 2131
页数:4
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