Thin-film composite resonators on crystalline substrates

被引：0
|
作者：
Ballato, A [1 ]
机构：
[1] USA, Res Dev & Evaluat Command, CERDEC, Ft Monmouth, NJ 07703 USA
来源：
2005 IEEE Ultrasonics Symposium, Vols 1-4 | 2005年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Telecommunications systems depend on high stability frequency sources. For mobile uses such as cell phones, size and cost are severe additional constraints. We describe a class of composite piezoresonators that are comprised of piezoelectric thin films deposited on crystalline plate substrates 11] oriented to obtain very low temperature coefficients of frequency (TCFs) for the composite structure. Specifically described are high-frequency bulk acoustic wave resonators (HBARs) comprised of piezoelectric thin films on AT- and BT-cut quartz substrates. An example design for a 2.1 GHz composite resonator is provided.
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页码：2128 / 2131
页数：4
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