Improvement of the stability of an electric double-layer transistor using a 1H, 1H,2H,2H-perfluorodecyltriethoxysilane barrier layer

被引：1

作者：

Liu, Yang ^{[1
]}

Fujii, Mami N. ^{[1
]}

Ishida, Shoma ^{[2
]}

Ishikawa, Yasuaki ^{[1
]}

Miwa, Kazumoto ^{[3
]}

Ono, Shimpei ^{[3
]}

Bermundo, Juan Paolo Soria ^{[1
]}

Fujita, Naoyuki ^{[2
]}

Uraoka, Yukiharu ^{[1
]}

机构：

[1] Nara Inst Sci & Technol, Grad Sch Mat Sci, Ikoma City, Nara 6300192, Japan

[2] Nara Coll, Dept Syst Innovat, Fac Adv Engn, Natl Inst Technol, Nara 6391080, Japan

[3] Cent Res Inst Elect Power Ind, Yokosuka, Kanagawa 2400196, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / 04期

关键词：

THIN-FILM TRANSISTORS; IONIC LIQUIDS; FABRICATION; OXYGEN;

D O I：

10.7567/1347-4065/ab008c

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electric double-layer transistors (EDLTs) are capable of achieving ultra-high carrier density and very low operating voltages. However, chemical reactions cause structural change at the semiconductor-insulator interface resulting in unstable device operation and reduced device lifetime. In this work we propose a method of depositing a 1H,1H,2H,2H-perfluorodecyltriethoxysilane (FDTS) layer which acts as a barrier between the semiconductor layer and the ionic liquid insulator. Our work shows that the effects of adding FDTS film are isolation of the chemical reaction and reduction of damage to the amorphous InGaZnO channel, thus achieving the effect of increasing device lifetime and stability. (C) 2019 The Japan Society of Applied Physics

引用

页数：4

共 50 条

[21] Modification of 1H,1H,2H,2H-perfluorooctyltrichlorosilane self-assembled monolayers by atomic hydrogen
Gorham, Justin M.
Stover, Adam K.
Fairbrother, D. Howard
JOURNAL OF PHYSICAL CHEMISTRY C, 2007, 111 (50): : 18663 - 18671
[22] THERMODYNAMIC PROPERTIES OF AQUEOUS-SOLUTIONS OF SOME N-(1H,1H,2H,2H PERFLUOROALKYL) PYRIDINIUM HALIDES
FISICARO, E
VISCARDI, G
PELIZZETTI, E
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1993, 205 : 23 - COLL
[23] STUDIES IN VITRO ON EFFECTS OF 1H,2H,4H(5H)-OCTAFLUOROCYCLOHEXANE AND 1H,4H(2H)-NONAFLUOROCYCLOHEXANE ON ENZYMES AND ORGANELLES
NATH, J
BRAY, HG
BIOCHEMICAL JOURNAL, 1969, 114 (04) : 785 - &
[24] FLUOROCYCLOHEXANES .4. 1H,2H-4H-NONALLUOROCYCLOHEXANE AND 1H,2H,4H-NONAFLUOROCYCLOHEXANE AND RELATED COMPOUNDS
STEPHENS, R
TATLOW, JC
WISEMAN, EH
JOURNAL OF THE CHEMICAL SOCIETY, 1959, (JAN): : 148 - 158
[25] Gas Phase Deposition of Trichloro(1H,1H,2H,2H-perfluorooctyl)silane on Silicon Dioxide, by XPS
Lee, Michael V.
Husseini, Ghaleb
Sautter, Ken
Linford, Matthew R.
SURFACE SCIENCE SPECTRA, 2010, 17 (01): : 87 - 92
[26] ORDERED STRUCTURES OF POLY(1H,1H,2H,2H-PERFLUORODECYL ALPHA-SUBSTITUTED ACRYLATE)S
SHIMIZU, T
TANAKA, Y
KUTSUMIZU, S
YANO, S
MACROMOLECULAR SYMPOSIA, 1994, 82 : 173 - 184
[27] Synthesis of Bis(1H, 1H, 2H, 2H-perfluoro-octyl)methylenesuccinate copolymers and their application on cotton fabrics
Ye, Haohua
Li, Zhanxiong
Chen, Guoqiang
Fan, Dan
JOURNAL OF APPLIED POLYMER SCIENCE, 2013, 127 (01) : 402 - 409
[28] FLUOROCYCLOHEXANES .5. 1H,4H-2H,5H-OCTAFLUOROCYCLOHEXANE, 1H,5H-2H,4H-OCTAFLUOROCYCLOHEXANE, 1H,2H-4H,5H-OCTAFLUOROCYCLOHEXANE, AND 1H,2H,4H-5H-OCTAFLUOROCYCLOHEXANE AND DERIVED COMPOUNDS
NIELD, E
STEPHENS, R
TATLOW, JC
JOURNAL OF THE CHEMICAL SOCIETY, 1959, (JAN): : 159 - 166
[29] FLUOROCYCLOPENTANES .1. 1H,2H- AND 1H,3H- OCTAFLUOROCYCLOPENTANES, AND 1H,3H/2H-HEPTAFLUOROCYCLOPENTANE
HEITZMAN, RJ
STEPHENS, R
PATRICK, CR
TATLOW, JC
JOURNAL OF THE CHEMICAL SOCIETY, 1963, (JAN): : 281 - &
[30] Initiated chemical vapor deposition of poly(1H,1H,2H,2H-perfluorodecyl acrylate) thin films
Gupta, Malancha
Gleason, Karen K.
LANGMUIR, 2006, 22 (24) : 10047 - 10052

← 1 2 3 4 5 →