Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges

被引：11

作者：

Drache, Steffen ^{[1
]}

Stranak, Vitezslav ^{[1
]}

Herrendorf, Ann-Pierra ^{[1
]}

Cada, Martin ^{[2
]}

Hubicka, Zdenek ^{[2
]}

Tichy, Milan ^{[3
]}

Hippler, Rainer ^{[1
]}

机构：

[1] Ernst Moritz Arndt Univ Greifswald, Inst Phys, D-17489 Greifswald, Germany

[2] Acad Sci Czech Republic, Inst Phys VVI, Prague 18221, Czech Republic

[3] Charles Univ Prague, Fac Math & Phys, CR-18000 Prague, Czech Republic

来源：

VACUUM | 2013年 / 90卷

关键词：

Dual magnetron; HiPIMS; MF-discharge; Langmuir probe; EEPF; ELECTRON-ENERGY DISTRIBUTION; FILMS; DEPOSITION; FREQUENCY;

D O I：

10.1016/j.vacuum.2012.02.047

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper focuses on time-resolved diagnostics of unipolar hybrid-dual-High Power Impulse Magnetron Sputtering (hybrid-dual-HiPIMS) discharges. The newly developed sputtering system is based on a combination of dual-HiPIMS with a mid-frequency (MF) discharge. The most important feature of hybrid-dual-HiPIMS systems is the MF pre-ionization which causes/allows: (i) a significant reduction of working pressure by more than one order of magnitude, and (ii) faster ignition and development of HiPIMS pulses. Parameters such as mean electron energy, electron density and electron energy probability function (EEPF) were obtained from time-resolved Langmuir probe diagnostics to demonstrate the aforementioned effects. Calorimetric probe diagnostics were used for determination of the total power density flux. Power flux contributions of particular species, e.g. ions, electrons and neutrals, were estimated as well. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：176 / 181

页数：6

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