共 50 条
- [41] Assessment of MEMS-based sensors for inclination measurements MAINTENANCE, SAFETY, RISK, MANAGEMENT AND LIFE-CYCLE PERFORMANCE OF BRIDGES, 2018, : 1577 - 1584
- [44] Development of Vibration Measurement Unit for Steel Structure Using MEMS Accelerometer PROCEEDINGS OF TENCON 2018 - 2018 IEEE REGION 10 CONFERENCE, 2018, : 0587 - 0592
- [45] Analysis of the thermal effect influence on the MEMS accelerometer sensors measurement results PHOTONICS APPLICATIONS IN ASTRONOMY, COMMUNICATIONS, INDUSTRY, AND HIGH-ENERGY PHYSICS EXPERIMENTS 2016, 2016, 10031
- [46] Structural Design and Optimization of MEMS based Capacitive Accelerometer PROCEEDINGS OF 2ND INTERNATIONAL CONFERENCE ON 2017 DEVICES FOR INTEGRATED CIRCUIT (DEVIC), 2017, : 294 - 298
- [47] Design of Distance Measuring System Based on MEMS Accelerometer Journal of Electrical Engineering & Technology, 2019, 14 : 1675 - 1682
- [48] Dynamic Response Considerations in Typical CMOS-MEMS Accelerometer Structures LATIN AMERICAN ELECTRON DEVICES CONFERENCE (LAEDC 2020), 2020,
- [49] HIGH DYNAMIC RANGE CMOS-MEMS CAPACITIVE ACCELEROMETER ARRAY 2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, : 992 - 995
- [50] Optical fiber accelerometer based on MEMS torsional micromirror MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 6836