Shear mode AlN thin film electroacoustic resonator for biosensor applications

被引：0
|
作者：
Wingqvist, G [1 ]
Bjurström, J [1 ]
Katardjiev, I [1 ]
机构：
[1] Uppsala Univ, Dept Solid State Elect, Uppsala, Sweden
来源：
2005 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 | 2005年
关键词：
component; thickness mode resonator; quasishear polarased acoustic wave; FBAR; AlN; tilted fims; biosensor;
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A thin film thickness excited shear acoustic wave resonator is presented. Utilizing a newly developed reactive sputtering process AlN thin films with inclined c-axis relative to the surface normal with a mean tilt of around 30 degrees are successfully grown. Using the above process, a biosensor consisting of a shear mode thin film bulk acoustic resonator (TFBAR) and a microfluidic transport system was fabricated. The biosensor operation in water, glycerol and albumin was characterised. The resonator had a resonance frequency of around 1.2 GHz and a Q value in water of around 150. The results demonstrate clearly the potential of FBAR biosensors for the fabrication of highly sensitive low cost biosensors, bioanalytical tools as well as for liquid sensing in general.
引用
收藏
页码：50 / 53
页数：4
相关论文
共 50 条
  • [41] Shear Mode ZnO Thin Film Applied in FBAR Sensor
    Cheng, Chien-Chuan
    Lin, Re-Ching
    Chang, Wei-Tsai
    Chen, Ying-Chung
    Kao, Kuo-Sheng
    Ou, Sin-Liang
    ADVANCED MANUFACTURING SYSTEMS, PTS 1-3, 2011, 201-203 : 718 - +
  • [42] Characteristics of Dual Mode AlN Thin Film Bulk Acoustic Wave Resonators
    Chen, Qingming
    Li, Fang
    Cheng, Hongbin
    Wang, Qing-Ming
    2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, : 609 - +
  • [43] Piezoelectric thin film ALN annular dual contour mode bandpass filter
    Stephanou, Philip J.
    White, Carolyn D.
    Piazza, Gianluca
    Wijesundara, Muthu B. J.
    Pisano, Albert P.
    Micro-Electro-Mechanical Systems - 2005, 2005, 7 : 517 - 523
  • [44] ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications
    Yan, Z.
    Zhou, X. Y.
    Pang, G. K. H.
    Zhang, T.
    Liu, W. L.
    Cheng, J. G.
    Song, Z. T.
    Feng, S. L.
    Lai, L. H.
    Chen, J. Z.
    Wang, Y.
    APPLIED PHYSICS LETTERS, 2007, 90 (14)
  • [45] Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
    Kan LI
    Journal of Zhejiang University(Science A:An International Applied Physics & Engineering Journal), 2009, 10 (03) : 464 - 470
  • [46] Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
    Li, Kan
    Jin, Hao
    Wang, De-miao
    Tang, Yi-fei
    JOURNAL OF ZHEJIANG UNIVERSITY-SCIENCE A, 2009, 10 (03): : 464 - 470
  • [47] Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
    Kan Li
    Hao Jin
    De-miao Wang
    Yi-fei Tang
    Journal of Zhejiang University-SCIENCE A, 2009, 10 : 464 - 470
  • [48] Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
    Martin, Fabrice
    Jan, Marc-Etienne
    Rev-Mermet, Samuel
    Belgacem, Brahim
    Su, Dong
    Cantoni, Marco
    Muralt, Paul
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (07) : 1339 - 1343
  • [49] Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
    Martin, F
    Jan, ME
    Rey-Mermet, S
    Su, D
    Muralt, P
    Cantoni, M
    2005 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4, 2005, : 333 - 336
  • [50] FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications
    Kulha, Pavel
    Laposa, Igor
    Laposa, Alexandr
    Husak, Miroslav
    MATERIALS AND APPLICATIONS FOR SENSORS AND TRANSDUCERS III, 2014, 605 : 569 - 572
12345