Power Matching to Pulsed Inductively Coupled Plasmas (vol 127, 133302, 2020)

被引：0
|
作者：
Qu, Chenhui [1 ]
Lanham, Steven J. [2 ]
Shannon, Steven C. [3 ]
Nam, Sang Ki [4 ]
Kushner, Mark J. [1 ]
机构：
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Chem Engn, Ann Arbor, MI 48109 USA
[3] North Carolina State Univ, Dept Nucl Engn, Raleigh, NC 27695 USA
[4] Samsung Elect Co Ltd, Mechatron R&D Ctr, 1-1 Samsungjeonja Ro, Hwaseong Si 18448, Gyeonggi Do, South Korea
来源：
JOURNAL OF APPLIED PHYSICS | 2020年 / 128卷 / 08期
关键词：
D O I：
10.1063/5.0023888
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页数：1
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