Formation of Two-Component Two-Phase Metal Films at Elevated Temperatures

被引：4
|
作者：
Begrambekov, L. B. [1 ]
Gordeev, A. A. [1 ]
Sadovskii, Ya. A. [1 ]
机构：
[1] Moscow Engn Phys Inst State Univ, Moscow, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2008年 / 2卷 / 03期
关键词：
D O I：
10.1134/S1027451008030178
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
This paper is devoted to the study of two-component thin films deposited at elevated temperatures. The dependence of plasma-assisted film deposition from a flow of sputtered Cu and Fe atoms on the substrate temperature and type, concentration of sputtered components in the flow, and film thickness is investigated.
引用
收藏
页码：419 / 422
页数：4
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